| Description
| This course aims to provide students a broad scope of hand-on knowledge on the facility system of a semiconductor or photonic fabrication factory. The facility system includes nine sub-systems: chilled water system, exhaust air system, compressed air system, process cooling water (PCW) system, vacuum system, ultra pure water (UPW) system, power and monitoring system, nitrogen system and fresh air system. Course material is basically based on and closely linked with field operational experience. A factory visit tour will be arranged.
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