| Course Code | Course Name | Credits | Hours |
|---|---|---|---|
| 4007014 | Computer aided laser interference measuring and correction | 3.0 | 3 |
| Description | Correction of mechanic system with motion controlling by using laser interference solution, the technology would calibrate linear, angle, theta, horizontal/vertical flatness, 2D dynamic precision alignment. The course would introduce the theory of interference method, correction lens mounts, FFT frequency domain analysis, error compensation. | ||