| Description
| (1) Nano Thin Film Processing and Characterizations: Definition classification, characteristics, and applications of nano-film, fabrication process, the related metrology and analysis tools of nano material. (2) Nanobiotechnology: Introduction of cytobiology, molecular cell virus, manipulation of DNA and protein, optoelectronics metrology on biotechnology, nano/micro fabrication technology, case study of biopolymer detection system. (3) Sliconnano electronic device: Introduction of nano silicon technology,
advanced physics of nano silicon device predicted applications of variety of nano electronic device, electrical measurement of nano silicon device.
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