Course Code | Course Name | Credits | Hours |
---|---|---|---|
4006001 | MEMS Technology and Applications | 3.0 | 3 |
Description | 1. Introductions of Microsystem 2. Micromachining Processes include MUMPS, Pattern, Deposition, Etching 3. Design Tool include MEMCAD, Matlab, EM software, and Ansys 4.Applications include Pressure sensor, Accelerometer, …,etc, -probe card and other, RFMEMS, BioMEMS 5.Packaging and testing. |