Course Description

Course CodeCourse NameCreditsHours
4006001 MEMS Technology and Applications 3.0 3
Description 1. Introductions of Microsystem 2. Micromachining Processes include MUMPS, Pattern, Deposition, Etching 3. Design Tool include MEMCAD, Matlab, EM software, and Ansys 4.Applications include Pressure sensor, Accelerometer, íK,etc, -probe card and other, RFMEMS, BioMEMS 5.Packaging and testing.