| Course Code | Course Name | Credits | Hours |
|---|---|---|---|
| 4005143 | Semiconductor advanced equipment and key components | 3.0 | 3 |
| Description | As an extension of “Processing technology and equipment for advanced semiconductor manufacturing” course, this course focuses on how the scientific knowledge is connected and applied to the real development of tools and introduces the evolution of the design and application of semiconductor tools and key components. | ||