| Course Code | Course Name | Credits | Hours |
|---|---|---|---|
| 4005098 | Advanced Integrated Circuit Fabrication Process | 3.0 | 3 |
| Description | Study the state of the art of the IC fabrication processes, including heating, ion implant, PVD, CVD, lithograph, etching of the front-end processes and packaging and testing of back-end processes. The trends of the processes, the relationship of the processes with the physics of the devices and the process integrating technology will also be taught in this course. | ||