Course Description

Course CodeCourse NameCreditsHours
4005098 Advanced Integrated Circuit Fabrication Process 3.0 3
Description Study the state of the art of the IC fabrication processes, including heating, ion implant, PVD, CVD, lithograph, etching of the front-end processes and packaging and testing of back-end processes. The trends of the processes, the relationship of the processes with the physics of the devices and the process integrating technology will also be taught in this course.