Course Code | Course Name | Credits | Hours |
---|---|---|---|
3645023 | Semiconductor Fabrication Technologies | 3.0 | 3 |
Description | 1. Operating modes and theory of MOS devices. 2. Small-geometry effects. 3. Wafer growth. 4. Diffusion. 5. Ion implantation. 6. Oxidation. 7. CVD techniques. 8. Lithography. 9. Sputtering and evaporation. 10. Photo masking. 11. CMOS IC fabrication processing. |