Course Description

Course CodeCourse NameCreditsHours
3315133 Semiconductor Processings 3.0 3
Description Course OutlineˇG 1.Introduction to Semiconductor Device 2.Physical Vapor Deposition 3.Chemical Vapor Deposition 4.Photolithography˘wphotoresist coating, exposure, development 5.Etching˘wwet etching, dry etching 6.Doping˘wdiffusion, ion implantation 7.Oxidation and Thermal Treatment Process