| Course Code | Course Name | Credits | Hours |
|---|---|---|---|
| 3315133 | Semiconductor Processings | 3.0 | 3 |
| Description | Course Outline： 1.Introduction to Semiconductor Device 2.Physical Vapor Deposition 3.Chemical Vapor Deposition 4.Photolithography─photoresist coating, exposure, development 5.Etching─wet etching, dry etching 6.Doping─diffusion, ion implantation 7.Oxidation and Thermal Treatment Process | ||