Course Description

Course CodeCourse NameCreditsHours
3314138 Surface Analysis Techniques 3.0 3
Description This course firstly gives an introduction on the basic surface structure and surface physical and chemical pheomena, and the priciples of vacuum. Electron beam and specimen interactions will be given as the basic for surface analysis techniques. Then the various surface techniques such as SEM, Auger electron spectroscopy, secondary ion mass spectrometry and atomic force microscopy will be discussed.