| Description
| This course discusses: 1. Coating film materials science 2. Vacuum science and technology 3. Coating film evaporation processes 4. Discharge, plasma, and ion-surface interaction 5. Plasma and ion beam processing of coating films 6. Chemical vapor deposition 7. Substrate surfaces and coating film nucleation 8. Coating Film structure 9. Characterization of coating films and surface 10. Interdiffusion, reactions, and transformations in coating films 11. Mechanical properties of coating films.
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