| Course Code | Course Name | Credits | Hours |
|---|---|---|---|
| 3313139 | Micro- and Nano-Mechanical System | 3.0 | 3 |
| Description | Overview of Optical MEMS and NEMS,MicrosystemsWorking Principles of Optical MicrosystemsOverview of Optical MEMSOptical Microsystems DesignOptical Microsystems PackagingOptical Microsystems Testing. | ||