| Course Code | Course Name | Credits | Hours |
|---|---|---|---|
| 3103103 | Integrated circuits fabrication technologies | 3.0 | 3 |
| Description | In this lecture, the following topics will be introduced: 1.Operating modes & theory of MOS devices; 2.Small-geometry effects on MOS devices; 3.Silicon wafer growth; 4.CMOS IC fabrication processes; 5.Photomasks & photolithography; 6.Oxidations; 7.Diffusion & ion implantation; 8.CVD techniques; 9.Evaporation & sputtering. | ||