Course Description

Course CodeCourse NameCreditsHours
3004094 MEMS technology 3.0 3
Description The course contents include concept and characteristics of MEMS, principles of micro system design, inter-disciplinary simulation and analysis, materials for MEMS, main-stream MEMS processing technologies, CMOS-MEMS process integration, package and test techniques, micro sensors and actuators, smart devices and SOC, and closure with a number of engineering applications.