| Course Code | Course Name | Credits | Hours |
|---|---|---|---|
| 3004094 | MEMS technology | 3.0 | 3 |
| Description | The course contents include concept and characteristics of MEMS, principles of micro system design, inter-disciplinary simulation and analysis, materials for MEMS, main-stream MEMS processing technologies, CMOS-MEMS process integration, package and test techniques, micro sensors and actuators, smart devices and SOC, and closure with a number of engineering applications. | ||