| Description
| In this course, basic knowledges of vacuum technology and thin film engineering will be provided, and can be the foundation for learning semiconductor process equipment as students join the industry. Vacuum equipment and industry outlook will also be covered.
Basics of vacuum principle, equipment and measurement/leak detection will be provided in the course. With the basics of vacuum technology, students will further explore the knowledge of thin film processes, such as PVD, CVD, ALD and epitaxy, especially for manufacturing semiconductor devices.
The syllabus of course is outlined as follows.
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