| Course Code | Course Name | Credits | Hours |
|---|---|---|---|
| B203011 | Semiconductor Factory Technology | 3.0 | 3 |
| Description | This course aims to equip students with fundamental knowledge required for semiconductor facility construction and operation. Topics include cleanroom design and environmental control, utility systems (e.g., ultrapure water, gases, power, vacuum systems), waste management and EHS standards, smart management and automated monitoring, as well as key considerations for cleanroom standards, strict schedules, quality, and safety control in high-tech plant construction. | ||