Course Description

Course CodeCourse NameCreditsHours
B202010 Properties and Fabrication Techniques of Semiconductor Thin 3.0 3
Description This course mainly introduce on semiconductor materials and fabrication technology: 1. Overview of semiconductor industry and circuit component introduction 2. Semiconductor fundamental (materials, device physics and application) 3. Front End of Line (FEOL) Technology 4. Backend of Line (BEOL) Technology 5. Crystal growth , basic properties of Silicon Wafer 6. Introduce 7 principle fabrication modules: Photo lithography, film deposition, etch, clean, CMP, Diffusion and process integration 7. Introduce device electrical test 8. Semiconductor packaging