| Course Code | Course Name | Credits | Hours |
|---|---|---|---|
| 6505101 | Optical Semiconductor Principles and Process Technologies | 3.0 | 3 |
| Description | The course is including: 1. Semiconductor Materials and Band Theory, 2. Photo- lithography, 3. Copper (Cu) Electroplate Technique, 4.Chemical Mechanical Polishing (CMP), 5. Thermal Process- Oxidation, Diffusion, 6. Wet Clean and Etch Process, 7. Dry Etching Technique. 8. Chemical Vapor Deposition (CVD), 9. Physical Vapor Deposition (PVD) and 10. Ion Implantation. | ||