| Course Code | Course Name | Credits | Hours |
|---|---|---|---|
| 5605012 | Micro Electro-mechanical System | 3.0 | 3 |
| Description | The characteristics of micro electro-mechanical system. Basic concepts of micro physics. Analysis of a microstructure. A study of micro-machine technologies. Analysis of manufacturing technologies of micro pressure sensor, micro hydraulic and pneumatic Actuator. | ||