Course Description

Course CodeCourse NameCreditsHours
4005149 Equipment – Advanced Technologies of Semiconductor 3.0 3
Description 1.Semiconductor: 5 Modules – Vacuum, Robot, Plasma/RF, Electric Static Chuck (ESC)/Heater and Gas Panel. 8 Equipment - Epi/RTP, Implant, MDP, DDP, Etch, CMP, PDC and ECD. 2.Factory Touring: Global Technical Learning Center (GTLC) Lab Touring at Hsinchu. 3.Top Executive Sharing: Worthy Horng – Cust Services & Supt, VP of AMAT. 4.Final Exam – Poster Exhibition.