| 課程編碼 Course Code | 中文課程名稱 Course Name (Chinese) | 英文課程名稱 Course Name (English) | 總學分數 Credits | 總時數 Hours |
|---|---|---|---|---|
| 6105049 | 微奈米量測系統與技術 | Micro-and Nano-measurement Systems and Techniques | 3.0 | 3 |
| 中文概述 Chinese Description | 微奈米量測工程技術為是現代科技發展之重要前瞻技術，它將探討有效尺寸在微奈米等級範圍之精密量測儀器與技術. 本課程將涵括下列各項現代精密量測主題: 1.近代光電量測系統與技術 2.量測統計原理 3.量測信號處理 4.三次元座標量測系統與技術 5.雷射干涉系統與技術 6.影像量測系統與技術 7.微奈米量測系統與技術-干涉術、相位移術、調變術、光共焦 及 自動聚焦術 8.微奈米量測系統與技術--掃瞄探針顯微鏡(SPM), STM, AFM 及 SNOM. 9.奈米粉體量測系統與技術 10.量測實驗 11.小型量測儀器之專題製作 | |||
| 英文概述 English Description | This subject is arranged to introduce the advanced systems and technology associated with micro- and nano-scale measurement. The subject includes the following subtopics: 1.Modern opto-electro measurement systems and techniques 2.Statistic principles for measurement 3.Signal processing techniques 4.Three-dimensional measurement systems and techniques 5.Laser interferometric metrology and systems 6.Image processing techniques for metrology 7.Micro and nano-measurement systems and techniques (I) - Moire interferometry, phase shifting, signal modulation, confocal and auto-focusing techniques. 8.Micro- and nano-measurement systems and techniques (II) - SPM, STM, AFM and SNOM. 9.Nano-particle measurement systems and techniques 10.Student laboratory/practices 11.Team project work for design and fabrication of small-scaled measurement instrument | |||
備註：