| 課程編碼 Course Code | 中文課程名稱 Course Name (Chinese) | 英文課程名稱 Course Name (English) | 總學分數 Credits | 總時數 Hours |
|---|---|---|---|---|
| 5305017 | 膜層分析技術及應用 | Techniques and Applications of Films Analysis | 3.0 | 3 |
| 中文概述 Chinese Description | 先修課程：負責教授同意。 表面現象、膜層厚度、介面反應等與近代高科技技術，如鍍膜工程、表面處理、腐蝕、磨潤、微機電、感測器、光電半導體技術等息息相關，且日益重要。表面分析是原子層次的相關研究，它包括振動、電子或離子頻譜分析、微技術等之應用。主要的項目包含：表面形貌觀察(SEM、BSEM、AFM)、成份分析(光譜分析、質譜分析、EDX)、結構分析(XRD、AES、ESCA、XPS)、鍵結分析(Raman光譜、FTIR),光電性質、表面粗糙度、膜厚、附著力、內應力等膜之特性分析。 | |||
| 英文概述 English Description | Surface phenomena, films thickness and processes occurring at interface are becoming increasingly important in a wide variety of industrial applications including the areas of films coating surface treatments, conclusion, triobology, microelectronics, sensors and optical semi-conductor technologies. Accompanying this is an ever-growing need for surface characterization allowing better definition of processes occurring at a microscopic level.Surface analysis is the use of vibration, electron or ion spectroscopic and microscopic techniques for the study of material at the atomic level, it includes optical-electrical properties SEM, AFM, XRD, EDX, ESCA, XPS, AES, Raman Spectrum, and FTIR analysis. | |||
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