課程編碼 Course Code | 中文課程名稱 Course Name (Chinese) | 英文課程名稱 Course Name (English) | 總學分數 Credits | 總時數 Hours |
---|---|---|---|---|
4505307 | 現代真空技術 | Modern Vacuum Technology | 3.0 | 3 |
中文概述 Chinese Description | 「現代真空技術」課程概述 真空技術廣泛應用在高科技產業中,如半導體、平面顯示器、光電、薄膜、低溫冷凍、太陽能、材料冶金、生物科技等。近幾年來由於高科技產業的蓬勃發展,帶動了真空產業的起飛,使得真空技術的發展一日千里,本課程除了介紹基本真空技術原理之外,另外將介紹目前在高科技產業中所使用的各項真空系統及相關零組件。課程內容包含有真空技術基礎、真空幫浦、真空計、真空材料與元件、抽氣過程與幫浦大小之選擇、真空系統、真空測漏技術與真空技術之應用。 | |||
英文概述 English Description | The vacuum technology and industry are growing fast in the past two decades because of the highly growing of the high-tech industries including semiconductor, flat panel displayer, optics-electrics, thin film, cryogenic, solar energy, material, and biotechnology. The course will introduce the basic vacuum technology and the newly vacuum equipment and related vacuum components widely used in modern high-tech industrials. The contents of the course are basic vacuum technology, vacuum pump, vacuum gauge, material and component, pumping system, leak detection, and applications of vacuum technology. |
備註: