| 課程編碼 Course Code | 中文課程名稱 Course Name (Chinese) | 英文課程名稱 Course Name (English) | 總學分數 Credits | 總時數 Hours |
|---|---|---|---|---|
| 4504706 | 半導體與光電廠務設施 | The facility system of semiconductor or photonic fabrication | 3.0 | 3 |
| 中文概述 Chinese Description | 本課程主要針對半導體與光電廠務設施作一般性的論述，課程包含廠務設施的九大系統：冰水機系統、排氣系統、電力監控系統、壓縮空氣系統、氮氣系統、純水系統、真空系統、製程冷卻水系統及外氣空調系統。期使修習本課程之學生有一和實務聯結之機會，並和理論作相相互映證。 | |||
| 英文概述 English Description | This course aims to provide students a broad scope of hand-on knowledge on the facility system of a semiconductor or photonic fabrication factory. The facility system includes nine sub-systems: chilled water system, exhaust air system, compressed air system, process cooling water (PCW) system, vacuum system, ultra pure water (UPW) system, power and monitoring system, nitrogen system and fresh air system. Course material is basically based on and closely linked with field operational experience. A factory visit tour will be arranged. | |||
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