課程編碼 Course Code | 中文課程名稱 Course Name (Chinese) | 英文課程名稱 Course Name (English) | 總學分數 Credits | 總時數 Hours |
---|---|---|---|---|
4006001 | 微機電技術與應用 | MEMS Technology and Applications | 3.0 | 3 |
中文概述 Chinese Description | 微加工程序含MUMPS,打樣、沉積、蝕刻;設計工具含MEMCAD, Matlab, EM software, and Ansys 等;應用例含壓力感測器、加速度計、探針卡、微波元件、生物晶片等;最後介紹封裝與測試技術。 | |||
英文概述 English Description | 1. Introductions of Microsystem 2. Micromachining Processes include MUMPS, Pattern, Deposition, Etching 3. Design Tool include MEMCAD, Matlab, EM software, and Ansys 4.Applications include Pressure sensor, Accelerometer, …,etc, -probe card and other, RFMEMS, BioMEMS 5.Packaging and testing. |
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