Course Syllabus

Course Information：

Year-Semester	Course Number	Course Name	Phase	Credits	Hours	Required/Elective	Instructor	Class	Student NO.	Withdraw	Note
Fall Semester Year 2017	232754	Micro Electro-mechanical System	1	3.0	3	★	Ho-Chiao Chuang	GME GMT	34	1	機電所與製科所合開，中英授課

Course Plan：

Instructor	Ho-Chiao Chuang
Email	hchuang@ntut.edu.tw
Last Updated	2017-05-26 17:21:49
Course Objective	先修課程: 負責教授同意。本課程目的在介紹蓬勃發展中的微機電系統(micro-electro-mechanical systems, MEMS)工程與最新應用。其內容包括 : MEMS之概念與特性、微觀設計原則、跨領域模擬分析、加工材料分類、主要製程技術介紹、CMOS-MEMS整合製造、封裝與測試技術、微感測器與微致動器、智慧型元件與SOC、工程應用實例介紹
Course Schedule	1. Introduction to MEMS / Microsystems 2. Microelectronics Fabrication 3. CAD / CAM of MEMS 4. Mechanical Transducers 5. Microactuators 6. Thermal Transducers 7. Optical Microsystems 8. MEMS in Medicine and Biology 9. Microsystems Packaging
Evaluation and grading policy	作業 30% 出席 10% 期末報告 30% (口頭 10% 與 20% 書面) 期末測驗 30%
Materials	All right reserved. Do not reproduce without permission. Foreign-language textbooks:No 自編講義
The access to curricular consultation
Note